arsine

> arsine Had a client in the 80's that used Arsine to make gallium arsnide LED's.

Yes, they handle stuff like arsenic gas (arsine AsH3), but they really try to reclaim it all.

Constrast this to Arsine gas (AsH3--flammable and toxic--oh, the joy!) which everybody works to get rid of.

Semiconductor Fabrication (7nm/5nm) The main processor requires ultra-clean rooms, toxic gases (arsine, phosphine), and chemical etching.

Said on the bright side at least Arsine catches fire when you have serious leak.

If you are doing this, avoid epitaxy, which involves arsine and phosphine.

Specialty gases What's a little diborane, phosphine, or arsine among friends?

We're not talking dimethylmercury or arsine gas levels of toxicity.

I'll admit that outgassing arsine if it gets moldy is pretty nasty, though.

A death caused by arsine poisoning was mentioned.

This technique is widely used for growing periodic groups III, IV, and V semiconductor crystals.[16][17] Doping An epitaxial layer can be doped during deposition by adding impurities to the source gas, such as arsine, phosphine, or diborane (PDS: There are probably all sorts of ways to do this, in theory any chemical or chemical compound can act as a dopant...

Anyway, multiply this headache by nitric acid, hydrofluoric, bare wafers, several kinds of photoresist, arsine, phosphene, diborane, silane, cmp slurry, and dozens of other ingredients, plus oem spares for ten thousand different consumables for your equipment.

Arsine gave the techs and engineers the creeps.